MTSCENG X300 - On the Scope - A Masterclass in Practical Scanning Electron Microscopy

Delivery Options

Hybrid: This program combines asynchronous online learning with an in-person laboratory component. Participants complete the online coursework and then attend either the Traditional Group Lab Track or the Flexible Individual Track.

Time to Completion

This program is projected to take approximately 45 hours to complete.

Course Completion Requirements

Successful completion of this course requires earning a score of at least 80% on required assessments and completing all required program components.

Technology Requirements

• Reliable internet connection
• Computer, laptop, or tablet capable of accessing online course materials
• Ability to stream video and interactive content
• Recommended browsers: Google Chrome or Firefox

• Describe the basic components of an SEM column.
• Explain the differences between SEMs and other electron/x-ray imaging techniques.
• Recognize the applications for which SEMs are most suitable.
• Understand the types of signals generated within SEM chambers.
• Relate the importance of proper preparation for different types of SEM samples.

• Define and describe all relevant imaging terminology (resolution, pixel size, field width, etc.).
• Relate the differences between information contained in images formed by various types of signals and detectors.
• Understand how different microscope and acquisition settings affect image quality.
• Demonstrate how to acquire different types of images.
• Explain how different material types require different imaging strategies.

• Understand the process of EDS data collection and analysis.
• Describe the advantages and disadvantages between spot, line, and map collection schemes, and explain when each type is most appropriate.
• Relate the importance of proper sample preparation for EDS analysis.
• Explain the factors limiting accuracy and resolution of EDS results, especially quantification.
• Demonstrate how to identify different elements present in a material.

• Explain the different types of information obtainable through EBSD.
• Relate the importance of proper sample preparation for EBSD analysis.
• Explain the origins of Kikuchi patterns and the process of indexing them.
• Describe the different types of resolution in the context of EBSD.
• Demonstrate the process of EBSD data acquisition and analysis.

• Describe immersion lenses and explain their effects.
• Define energy thresholding and demonstrate how to use it.
• Define stage biasing and demonstrate how to use it.
• Describe the benefits and limitations of variable pressure SEM operation.
• Explain STEM imaging in SEMs, including its benefits and limitations.
• Explain the TKD analysis process and its benefits and limitations.
• Describe cathodoluminescence and what information it provides.

• Introduction to scanning electron microscopy (SEM)
• Electron sources probe formation
• Detectors in the SEM
• Sample Prep
• High resolution imaging
• Non-conductive sample imaging
• Energy dispersive X-Ray spectroscopy (EDS)
• Electron backscatter diffraction (EBSD)

• Cathodoluminescence
• In-situ/environmental SEM
• STEM in SEM
• Intro to FIB
• Semiconductor defect analysis
• Metallography/fractography
• Image analysis
• EDS data analysis
• EBSD data analysis
• Large area Imaging

• Basic imaging
• Instrument alignment
• Advanced imaging detectors
• EDS

• Electron backscatter diffraction
• Cathodoluminescence
• Large area imaging
• Metallographic analysis
• Semiconductor imaging
• Biological sample imaging
• In-situ/environmental SEM
• STEM in SEM
• Variable pressure SEM/non-conductive imaging
• Advanced EDS
• Ultra-high resolution imaging